It Truly is assumed that in some cases, secondary thermal ALD reactions through the gaseous by-merchandise may result in an seemingly better conformality than might be attained by using a “pure” plasma system. For instance, experimental film thickness profiles obtained for PE-ALD of Al2O3 by Dendooven et al. 198 concluded https://aldfilmproperties36936.fitnell.com/59643032/helping-the-others-realize-the-advantages-of-atomic-layer-deposition